納米技術中的顯微學手冊第1卷：光學顯微學、掃描探針顯微學、離子顯微學和納米製造

《納米技術中的顯微學手冊第1卷：光學顯微學、掃描探針顯微學、離子顯微學和納米製造》是2006年清華大學出版社出版的圖書，作者是姚楠、王中林。

基本介紹

• 中文名：納米技術中的顯微學手冊第1卷：光學顯微學、掃描探針顯微學、離子顯微學和納米製造
• 作者：姚楠、王中林
• 出版社：清華大學出版社
• 出版時間：2006年03月01日
• 頁數：333 頁
• 定價：78 元
• 開本：16 開
• 裝幀：圓脊精裝
• ISBN：9787302111887
• 印次：1-2

內容簡介

現代顯微學在納米技術領域的研究和發展中起到“眼睛”和“手”的功能。迄今，人們仍在孜孜不倦地尋找納米尺度上的“火眼金睛”。本手冊的目的在於提供關於各種顯微學的原理及其在該迅猛發展的領域內套用的綜述參考書。本手冊共有22個專題，每一專題都由不同研究領域的、處於世界前沿的科學家撰寫。本書是第1卷，涵蓋的範圍包括共聚焦光學顯微鏡、掃描近場光學顯微鏡、各種掃描探針顯微術、離子顯微鏡等，共有10個專題。本書力圖使讀者對所敘述的方法有一個概念上的理解，而不是只停留在對理論的堆砌上。在每一個專題里，都會敘述相關的實例及其套用並加以討論，使讀者對每種顯微技術都能明了和理解；還會進一步展示各章之間的內在聯繫，表明每一種技術如何在綜合性的、複雜的測試中各自扮演獨特的角色，解決具體的問題。

目錄

1ConfocalScanningOpticalMicroscopyandNanotechnology1

1.1Introduction1

1.2TheConfocalMicroscope3

1.2.1PrinciplesofConfocalMicroscopy3

1.2.2Instrumentation4

1.2.3TechniquesforImprovingImagingofNanoscaleMaterials6

1.3ApplicationstoNanotechnology11

1.3.1ThreeDimensionalSystems12

1.3.2TwoDimensionalSystems13

1.3.3OneDimensionalSystems14

1.3.4ZeroDimensionalSystems15

1.4SummaryandFuturePerspectives18

References18

2ScanningNearFieldOpticalMicroscopyinNanosciences25

2.1ScanningNearFieldOpticalMicroscopyandNanotechnology25

2.2BasicConcepts26

2.3Instrumentation27

2.3.1ProbeFabrication28

2.3.2FlexibilityofNearFieldMeasurements33

2.4ApplicationsinNanoscience35

2.4.1FluorescenceMicroscopy35

2.4.2RamanMicroscopy39

2.4.3PlasmonicandPhotonicNanostructures42

2.4.4Nanolithography47

2.4.5Semiconductors50

2.5Perspectives52

References53

3ScanningTunnelingMicroscopy57

3.1BasicPrinciplesofScanningTunnelingMicroscopy57

3.1.1ElectronicTunneling57

3.1.2ScanningTunnelingMicroscope60

3.2SurfaceStructureDeterminationbyScanningTunnelingMicroscopy61

3.2.1SemiconductorSurfaces62

3.2.2MetalSurfaces76

3.2.3InsulatorSurfaces79

3.2.4NanotubesandNanowires81

3.2.5SurfaceandSubsurfaceDynamicProcesses83

3.3ScanningTunnelingSpectroscopies85

3.3.1ScanningTunnelingSpectroscopy85

3.3.2InelasticTunnelingSpectroscopy87

3.3.3LocalWorkFunctionMeasurement89

3.4STMBasedAtomicManipulation95

3.4.1ManipulationofSingleatoms95

3.4.2STMInducedChemicalReactionatTip98

3.5RecentDevelopments101

3.5.1SpinPolarizedSTM103

3.5.2UltraLowTemperatureSTM108

3.5.3DualTipSTM110

3.5.4VariableTemperatureFastScanningSTM111

References113

4VisualizationofNanostructureswithAtomicForceMicroscopy119

4.1IntroductoryRemarks119

4.2BasicsofAtomicForceMicroscopy121

4.2.1MainPrincipleandComponentsofAtomicForceMicroscope121

4.2.2OperationalModes,OptimizationoftheExperimentandImageResolution128

4.2.3ImaginginVariousEnvironmentsandatDifferentTemperatures135

4.3ImagingofMacromoleculesandTheirSelfAssemblies141

4.3.1VisualizationofSinglePolymerChains141

4.3.2Alkanes,PolyethyleneandFluoroalkanes146

4.4StudiesofHeterogeneousSystems154

4.4.1SemicrystallinePolymers154

4.4.2BlockCopolymers155

4.4.3PolymerBlendsandNanocomposites158

4.5ConcludingRemarks161

References162

5ScanningProbeMicroscopyforNanoscaleManipulationandPatterning165

5.1Introduction165

5.1.1NanoscaleToolboxforNanotechnologists165

5.1.2Motivations168

5.2NanoscalePenWriting170

5.2.1DipPenNanolithography170

5.2.2NanoscalePrintingofLiquidInk174

5.3NanoscaleScratching176

5.3.1NanoscaleIndentation176

5.3.2Nanografting178

5.3.3NanoscaleMelting179

5.4NanoscaleManipulation180

5.4.1AtomicandMolecularManipulation180

5.4.2ManipulationofNanostructures181

5.4.3NanoscaleTweezers183

5.5NanoscaleChemistry184

5.5.1NanoscaleOxidation184

5.5.2NanoscaleDesorptionofSelfAssembledMonolayers186

5.5.3NanoscaleChemicalVaporDeposition187

5.6NanoscaleLightExposure187

5.7FuturePerspectives188

References190

6ScanningThermalandThermoelectricMicroscopy195

6.1Introduction195

6.2InstrumentationofScanningThermalandThermoelectricMicroscopy196

6.2.1InstrumentationofScanningThermalMicroscopy196

6.2.2InstrumentationofScanningThermoelectricMicroscopy201

6.3TheoryofScanningThermalandThermoelectricMicroscopy203

6.3.1TheoryofScanningThermalMicroscopy203

6.3.2TheoryofScanningThermoelectricMicroscopy208

6.4ApplicationsofScanningThermalandThermoelectricMicroscopyinNanotechnology209

6.4.1ThermalImagingofCarbonNanotubeElectronics209

6.4.2ThermalImagingofULSIDevicesandInterconnects212

6.4.3ShallowJunctionProfiling213

6.5SummaryandFutureAspects217

References217

7ImagingSecondaryIonMassSpectrometry219

7.1SecondaryIonMassSpectrometryandNanotechnology219

7.2IntroductiontoSecondaryIonMassSpectrometry220

7.2.1Overview220

7.2.2GeneralSIMSInstruments221

7.2.3HighResolutionImagingSIMSInstruments223

7.3ExperimentalIssuesinImagingSIMS224

7.4ApplicationsinNanotechnology227

7.4.1Example—PrecipitateDistributionsinMetallurgy227

7.4.2Example—HeterogeneousCatalystStudies229

7.4.3Example—NanoscaleBiologicalStructures232

7.5SummaryandFuturePerspectives233

References233

8AtomProbeTomography237

8.1AtomProbeTomographyandNanotechnology237

8.2InstrumentationofAtomProbeTomography237

8.2.1FieldIonMicroscope238

8.2.2TypesofAtomProbe240

8.2.3SpecimenPreparation246

8.3BasicInformation247

8.4DataInterpretationandVisualization248

8.4.1VisualizationMethods249

8.4.2QuantificationMethods251

8.5SampleAnalysisofNanomaterials:MultilayerFilms254

8.6SummaryandFuturePerspectives256

References256

9FocusedIonBeamSystem—aMultifunctionalToolforNanotechnology259

9.1Introduction259

9.2PrinciplesandPracticeoftheFocusedIonBeamSystem262

9.2.1IonBeamVersusElectronBeam265

9.2.2FocusedIonBeamMicroscopeVersusScanningElectronMicroscope266

9.2.3Milling268

9.2.4Deposition270

9.2.5Implantation272

9.2.6Imaging273

9.2.7TheDualBeamSystem275

9.3ApplicationofFocusedIonBeamInstrumentation277

9.3.1SurfaceStructureModification278

9.3.2TransmissionElectronMicroscopySamplepreparationforimagingandanalysis288

9.3.3SampleImaging—DefiningtheThirdDimension291

9.3.4DamagetotheSampleInducedbytheFocusedIonBeam294

References295

10ElectronBeamLithography299

10.1ElectronBeamLithographyandNanotechnology299

10.2InstrumentationofElectronBeamLithography301

10.2.1Principle301

10.2.2ElectronOptics302

10.3ElectronSolidInteractions313

10.3.1ElectronScatteringinSolid313

10.3.2ProximityEffect314

10.3.3ElectronBeamResists314

10.4PatternTransferProcess318

10.4.1AdditiveProcesses318

10.4.2SubtractiveProcesses320

10.5ApplicationsinNanotechnology322

10.5.1MaskMaking322

10.5.2DirectWriting325

10.6SummaryandFuturePerspectives330

References331

Index335