鄒赫麟，博導國際論文專家評審英國物理學會會員中國微納米學會會員。
基本介紹
- 中文名：鄒赫麟
- 外文名：Helin Zou
- 別名：無
- 國籍：中國
- 民族：漢族
- 職業：博導國際論文專家評審英國物理學會會員中國微納米學會會員
- 畢業院校：英國倫敦帝國學院
- 信仰：無
個人簡介,社會兼職,研究領域（研究課題）,碩博研究方向,出版著作和論文,在讀學生人數,畢業學生人數,
個人簡介
學歷學位
1978年至1982年, 大連理工大學物理系,套用物理, 獲理學學士
1987年至1989年, 大連理工大學物理系,半導體器件物理, 獲工學碩士
1997年至2001年, 英國威爾斯卡迪夫大學電子工程系,熱電子材料, 獲理學博士
2001年至2003年, 英國倫敦帝國學院，電子系, 微納米系統，博士後
工作經歷
1982年至1996年, 大連理工大學物理系,雷射，半導體，講師, 副教授 (1993)
1996年至1997年, 英國劍橋大學物理系, 納米電子學，訪問學者
1997年至2001年, 英國威爾斯卡迪夫大學電子工程系,助理研究員
2001年至2003年, 英國倫敦帝國學院，電子系, 微納米系統，研究員
2003年至2007年, 英國倫敦帝國學院，電子系, 微納米系統，高級研究員
2007年至今， 大連理工大學，微系統研究中心,教授、博士生導師
1978年至1982年, 大連理工大學物理系,套用物理, 獲理學學士
1987年至1989年, 大連理工大學物理系,半導體器件物理, 獲工學碩士
1997年至2001年, 英國威爾斯卡迪夫大學電子工程系,熱電子材料, 獲理學博士
2001年至2003年, 英國倫敦帝國學院，電子系, 微納米系統，博士後
工作經歷
1982年至1996年, 大連理工大學物理系,雷射，半導體，講師, 副教授 (1993)
1996年至1997年, 英國劍橋大學物理系, 納米電子學，訪問學者
1997年至2001年, 英國威爾斯卡迪夫大學電子工程系,助理研究員
2001年至2003年, 英國倫敦帝國學院，電子系, 微納米系統，研究員
2003年至2007年, 英國倫敦帝國學院，電子系, 微納米系統，高級研究員
2007年至今， 大連理工大學，微系統研究中心,教授、博士生導師
社會兼職
國際學術期刊論文專家評審
Journal of Microelectromechanical Systems
Journal of Micromechanics and Microengineering
英國物理學會會員
中國微納米學會會員
Journal of Microelectromechanical Systems
Journal of Micromechanics and Microengineering
英國物理學會會員
中國微納米學會會員
研究領域（研究課題）
研究領域：
微機電系統(MEMS)
精密儀器及測試技術
研究課題:
1）國家自然科學基金：重大項目（20890024）
仿生微-納流控晶片系統的研究
2）國家自然科學基金：重大研究計畫項目 (90607003）
適用於SOC的聲熱力微感測器系統的基礎研究
3) 遼寧省教育廳重點實驗室項目（2008S049）
微系統矽集成納升電噴霧電離源的研製
4）國家自然科學基金：重大研究計畫項目 （91023046）
納米製造的基礎研究
5）國家重點基礎研究發展計畫：（973計畫）（2011CB302105）
仿生光導航微納器件的設計與製造
6）國家自然科學基金：面上項目 （51075059 ）
大氣壓環境下高輸運效率MEMS納升電噴霧電離源的研究
微機電系統(MEMS)
精密儀器及測試技術
研究課題:
1）國家自然科學基金：重大項目（20890024）
仿生微-納流控晶片系統的研究
2）國家自然科學基金：重大研究計畫項目 (90607003）
適用於SOC的聲熱力微感測器系統的基礎研究
3) 遼寧省教育廳重點實驗室項目（2008S049）
微系統矽集成納升電噴霧電離源的研製
4）國家自然科學基金：重大研究計畫項目 （91023046）
納米製造的基礎研究
5）國家重點基礎研究發展計畫：（973計畫）（2011CB302105）
仿生光導航微納器件的設計與製造
6）國家自然科學基金：面上項目 （51075059 ）
大氣壓環境下高輸運效率MEMS納升電噴霧電離源的研究
碩博研究方向
微電子機械系統（MEMS）
微納流控晶片系統技術
微納米加工工藝技術
微電子與光電子技術
半導體材料與器件
微納流控晶片系統技術
微納米加工工藝技術
微電子與光電子技術
半導體材料與器件
出版著作和論文
1. Zhifu Yin, Liping Qi, Helin Zou* and Lei Sun. A novel 2D silicon nano-mold fabricationtechnique by inclined-deposition and Ar etching over 4 inch large area. Scientific Reports, 2016, 6: 18921-18921.
2. Lei Sun, Zhifu Yin, Liping Qi, Dongjiang Wu and Helin Zou*. A low-cost method of fabricating hybrid micro-nano fluidic chip by double-layer PDMS mold and UV-thermal nanoimprinting. Microfluidics and Nanofluidics, 2016, 20(4): 1-10.
3. Zhifu Yin, Liping Qi, Helin Zou*, Lei Sun and Shenbo Xu. The low auto-fluorescence fabrication methods for plastic nanoslits. IET nanobiotechnology, 2016, 10(2): 75-80.
4. Jingzhi He, Zhifu Yin, Chao Li, Wenqiang Wang and Helin Zou*. Fabrication of chamber for piezo inkjet printhead by SU-8 photolithography technology and bonding method. Microsystem Technologies, 2016. 22(4): 721-726.
5. Zhifu Yin, Lei Sun, E Cheng and Helin Zou*. Numerical study on the de-molding behavior of 2D PMMA nanochannles during hot embossing process. Microsystem Technologies, 2016, 22(1): 129-135.
6. Zhifu Yin, Liping Qi, Helin Zou*, Lei Sun and Shenbo Xu. A novel bonding method for fabrication of PET planar nanofluidic chip with low dimension loss and high bonding strength. Journal of Micromechanics and Microengineering, 2015, 25: 085015.
7. Bolin Lu, Zhifu Yin, Helin Zou*, Lisha Zhi and Jianbo Feng. Characterization of Parylene C as protective layer on micro-piezoelectric printheads. Materials Science in Semiconductor Processing, 2015, 40: 811-816.
8. Zhifu Yin, Lei Sun, Helin Zou* and Shenbo Xu. Bonding of 1D PMMA nanofluidic chip with low dimension loss and high bonding strength. Journal of Nanoscience and Nanotechnology, 2015, 15: 1-6.
9. Zhifu Yin, Lei Sun, Helin Zou* and E Cheng. Two dimensional PMMA nanofluidic device fabricated by hot embossing and oxygen plasma assisted thermal bonding methods. Nanotechnology, 2015, 26(21): 215302.
10. Wenhao Wang，Lisha Zhi，Jingning Han，Wencai Xu，Yongli Liu，Helin Zou(*)，Effect of Pyrolytic Film Thickness on the Texture Evolution of PZT Thin Films，Integrated Ferroelectrics: International Journal，2015，159（1）：108-113。
11. Zhifu Yin, E Cheng and Helin Zou*. A novel hybrid patterning technique for micro and nanochannel fabrication by integrating hot embossing and inverse UV photolithography. Lab on a Chip, 2014, 14(9): 1614-1621.
12. Zhifu Yin, E Cheng, Helin Zou* Li Chen and Xu Shenbo. Fabrication of two dimensional PET nanofluidic chip using hot embossing and thermal bonding technique. Biomicrofluidics, 2014, 8(6): 066503.
13. Zhifu Yin, E Cheng, Helin Zou*, Petr Jurc?cek. Analysis of polymer viscoelastic properties based on compressive creep tests during hot embossing for two-dimensional polyethylene terephthalate nanochannels. Polymer Engineering & Science, 2014, 54(10): 2398-2406.
14. E Cheng, Zhifu Yin, Helin Zou* and Li Chen. Surface modification-assisted bonding of 2D polymer-based nanofluidic devices. Microfluidics and Nanofluidics, 2014, 18(3): 527-535.
15. E Cheng, Zhifu Yin, Helin Zou*, Petr Jurc?cek. Experimental and numerical study on deformation behavior of polyethylene terephthalate two-dimensional nanochannels during hot embossing process. Journal of Micromechanics and Microengineering, 2014, 24(1): 015004.
16. Petr Jur?í?ek, Lingpeng Liu, Helin Zou*, Zhiqi An, *Hongbin Xiao, Design, simulation and evaluation of improved air amplifier incorporating an ion funnel for nano-ESI MS, European Journal of Mass Spectrometry. 20(2), pp 143-154, 2014.
17. Jurc?cek Petr, Lingpeng Liu，Helin Zou*, Numerical simulation of Monte Carlo ion transport at atmospheric pressure within improved air amplifier geometry [J].，International Journal of Ion Mobility Mass Spectrometry，17 (3-4), pp 157-166, 2014.
18. E Cheng, Helin Zou*, Zhifu Yin, Petr Jur?í?ek and Xi Zhang. Fabrication of 2D polymer nanochannels by sidewall lithography and hot embossing. Journal of Micromechanics and Microengineering, 2013, 23(7): 075022.
19. Jur?í?ek P, Zou H*, Gao S; Design, simulation, and fabrication of a mems-based air amplifier for electrospray ionization. J. Micro/Nanolith. MEMS MOEMS. 12(2), pp 0230061-0230067, 2013.
20. Zou,H.*; Li, Jin; Jurcícek,Petr; Wang,Guoqi, Microfabrication of a multilayer nano-ESI focusing electrode based on SU-8 material, Microelectronic Engineering, 103, pp 150-155, 2013.
21. Petr Jur?í?ek; Helin Zou*; Shuiping Zhang;Chong Liu, Design and Fabrication of Hollow Out-of-plane Silicon Microneedles, Micro & Nano Letters, 8(2), p. 78 – 81, 2013.
22. Yuzhang Liang; Wei Peng; Rui Hu; Helin Zou, Extraordinary optical transmission based on subwavelength metallic grating with ellipse walls, Optics Express, 2(1), pp 6139-6152, 2013.
23. K.Choonee, R.R.A.Syms, M.M.Ahmad, H.Zou, Post processing of microstructures by PDMS spray deposition. Sensors and Actuators, A: Physical, 2009. 155(2): p. 253-262.
24. R R A Syms, H Zou, K Choonee and R A Lawes，Silicon microcontact printing engines. Journal of Micromechanics and Microengineering, 2009. 19(2) 025027.
25. H.Veladi, R.R.A. Syms, H. Zou, A single-sided process for differentially cooled electrothermal micro-actuators, Journal Of Micromechanics And Microengineering, 2008, 18(5)
26. H.Veladi, R.R.A. Syms, H. Zou, “Fibre-pigtailed Electrothermal MEMS Iris VOA”, IEEE/OSA Journal of Lightwave Technology, Vol.25, No. 8, August 2007, SCI, 2.077,pp 2159-2167
27. H. Zou, S. Mellon, R. R. A. Syms, K. E. Tanner, “2-dimensional Dielectrophoresis based MEMS Device for Osteoblast Cell Stimulation”, Biomedical Microdevices, Vol. 8, pp 353-359, (2006).
28. R.R.A. Syms, H. Zou, J. Stagg, “Micro-opto-electro-mechanical systems alignment stages with Vernier latch mechanisms”, Journal of Optics A: Pure and Applied Optics, Vol. 8, pp 305-312 (May, 2006).
29. Syms R.R.A., Zou H., Boyle P. "Mechanical stability of a latching MEMS variable optical attenuator" IEEE/ASME J. Microelectromechanical Systems, Volume 14, No 3, pp 529-538, (June 2005).
30. H. Zou, “Anisotropic Si deep beam etching with profile control using SF6 /O2 plasma”, Microsystem Technologies, 10, No 8-9, pp 603-607, (November 2004).
31. R.R.A. Syms, H. Zou, J. Stagg, D.F. Moore, “Multi-state Latching MEMS Variable Optical Attenuator” IEEE Photonics Technology Letters, Vol. 16, No. 1, pp 191-193, (January 2004).
32. H. Zou, D. M. Rowe, S.G.K. Williams, “Peltier effect in a co-evaporated Sb2Te3(P)- Bi2Te3(N) thin film thermocouple”, Thin solid films, Vol. 408, No. 1-2, pp 270-274, (April 2002).
33. H. Zou, D. M. Rowe, G. Min, “Growth of p- and n- type bismuth telluride thin films by co-evaporation”, Journal of Crystal Growth, Vol.222, No. 1-2, pp 82-87, (January 2001).
34. H. Zou, D. M. Rowe, G. Min, “Preparation and characterisation of p-type Sb2Te3 and n-type Bi2Te3 thin films grown by co-evaporation”, Journal of Vacuum Science and Technology A, Vol. 19, No. 3, pp 899-903, (May/Jun, 2001).
2. Lei Sun, Zhifu Yin, Liping Qi, Dongjiang Wu and Helin Zou*. A low-cost method of fabricating hybrid micro-nano fluidic chip by double-layer PDMS mold and UV-thermal nanoimprinting. Microfluidics and Nanofluidics, 2016, 20(4): 1-10.
3. Zhifu Yin, Liping Qi, Helin Zou*, Lei Sun and Shenbo Xu. The low auto-fluorescence fabrication methods for plastic nanoslits. IET nanobiotechnology, 2016, 10(2): 75-80.
4. Jingzhi He, Zhifu Yin, Chao Li, Wenqiang Wang and Helin Zou*. Fabrication of chamber for piezo inkjet printhead by SU-8 photolithography technology and bonding method. Microsystem Technologies, 2016. 22(4): 721-726.
5. Zhifu Yin, Lei Sun, E Cheng and Helin Zou*. Numerical study on the de-molding behavior of 2D PMMA nanochannles during hot embossing process. Microsystem Technologies, 2016, 22(1): 129-135.
6. Zhifu Yin, Liping Qi, Helin Zou*, Lei Sun and Shenbo Xu. A novel bonding method for fabrication of PET planar nanofluidic chip with low dimension loss and high bonding strength. Journal of Micromechanics and Microengineering, 2015, 25: 085015.
7. Bolin Lu, Zhifu Yin, Helin Zou*, Lisha Zhi and Jianbo Feng. Characterization of Parylene C as protective layer on micro-piezoelectric printheads. Materials Science in Semiconductor Processing, 2015, 40: 811-816.
8. Zhifu Yin, Lei Sun, Helin Zou* and Shenbo Xu. Bonding of 1D PMMA nanofluidic chip with low dimension loss and high bonding strength. Journal of Nanoscience and Nanotechnology, 2015, 15: 1-6.
9. Zhifu Yin, Lei Sun, Helin Zou* and E Cheng. Two dimensional PMMA nanofluidic device fabricated by hot embossing and oxygen plasma assisted thermal bonding methods. Nanotechnology, 2015, 26(21): 215302.
10. Wenhao Wang，Lisha Zhi，Jingning Han，Wencai Xu，Yongli Liu，Helin Zou(*)，Effect of Pyrolytic Film Thickness on the Texture Evolution of PZT Thin Films，Integrated Ferroelectrics: International Journal，2015，159（1）：108-113。
11. Zhifu Yin, E Cheng and Helin Zou*. A novel hybrid patterning technique for micro and nanochannel fabrication by integrating hot embossing and inverse UV photolithography. Lab on a Chip, 2014, 14(9): 1614-1621.
12. Zhifu Yin, E Cheng, Helin Zou* Li Chen and Xu Shenbo. Fabrication of two dimensional PET nanofluidic chip using hot embossing and thermal bonding technique. Biomicrofluidics, 2014, 8(6): 066503.
13. Zhifu Yin, E Cheng, Helin Zou*, Petr Jurc?cek. Analysis of polymer viscoelastic properties based on compressive creep tests during hot embossing for two-dimensional polyethylene terephthalate nanochannels. Polymer Engineering & Science, 2014, 54(10): 2398-2406.
14. E Cheng, Zhifu Yin, Helin Zou* and Li Chen. Surface modification-assisted bonding of 2D polymer-based nanofluidic devices. Microfluidics and Nanofluidics, 2014, 18(3): 527-535.
15. E Cheng, Zhifu Yin, Helin Zou*, Petr Jurc?cek. Experimental and numerical study on deformation behavior of polyethylene terephthalate two-dimensional nanochannels during hot embossing process. Journal of Micromechanics and Microengineering, 2014, 24(1): 015004.
16. Petr Jur?í?ek, Lingpeng Liu, Helin Zou*, Zhiqi An, *Hongbin Xiao, Design, simulation and evaluation of improved air amplifier incorporating an ion funnel for nano-ESI MS, European Journal of Mass Spectrometry. 20(2), pp 143-154, 2014.
17. Jurc?cek Petr, Lingpeng Liu，Helin Zou*, Numerical simulation of Monte Carlo ion transport at atmospheric pressure within improved air amplifier geometry [J].，International Journal of Ion Mobility Mass Spectrometry，17 (3-4), pp 157-166, 2014.
18. E Cheng, Helin Zou*, Zhifu Yin, Petr Jur?í?ek and Xi Zhang. Fabrication of 2D polymer nanochannels by sidewall lithography and hot embossing. Journal of Micromechanics and Microengineering, 2013, 23(7): 075022.
19. Jur?í?ek P, Zou H*, Gao S; Design, simulation, and fabrication of a mems-based air amplifier for electrospray ionization. J. Micro/Nanolith. MEMS MOEMS. 12(2), pp 0230061-0230067, 2013.
20. Zou,H.*; Li, Jin; Jurcícek,Petr; Wang,Guoqi, Microfabrication of a multilayer nano-ESI focusing electrode based on SU-8 material, Microelectronic Engineering, 103, pp 150-155, 2013.
21. Petr Jur?í?ek; Helin Zou*; Shuiping Zhang;Chong Liu, Design and Fabrication of Hollow Out-of-plane Silicon Microneedles, Micro & Nano Letters, 8(2), p. 78 – 81, 2013.
22. Yuzhang Liang; Wei Peng; Rui Hu; Helin Zou, Extraordinary optical transmission based on subwavelength metallic grating with ellipse walls, Optics Express, 2(1), pp 6139-6152, 2013.
23. K.Choonee, R.R.A.Syms, M.M.Ahmad, H.Zou, Post processing of microstructures by PDMS spray deposition. Sensors and Actuators, A: Physical, 2009. 155(2): p. 253-262.
24. R R A Syms, H Zou, K Choonee and R A Lawes，Silicon microcontact printing engines. Journal of Micromechanics and Microengineering, 2009. 19(2) 025027.
25. H.Veladi, R.R.A. Syms, H. Zou, A single-sided process for differentially cooled electrothermal micro-actuators, Journal Of Micromechanics And Microengineering, 2008, 18(5)
26. H.Veladi, R.R.A. Syms, H. Zou, “Fibre-pigtailed Electrothermal MEMS Iris VOA”, IEEE/OSA Journal of Lightwave Technology, Vol.25, No. 8, August 2007, SCI, 2.077,pp 2159-2167
27. H. Zou, S. Mellon, R. R. A. Syms, K. E. Tanner, “2-dimensional Dielectrophoresis based MEMS Device for Osteoblast Cell Stimulation”, Biomedical Microdevices, Vol. 8, pp 353-359, (2006).
28. R.R.A. Syms, H. Zou, J. Stagg, “Micro-opto-electro-mechanical systems alignment stages with Vernier latch mechanisms”, Journal of Optics A: Pure and Applied Optics, Vol. 8, pp 305-312 (May, 2006).
29. Syms R.R.A., Zou H., Boyle P. "Mechanical stability of a latching MEMS variable optical attenuator" IEEE/ASME J. Microelectromechanical Systems, Volume 14, No 3, pp 529-538, (June 2005).
30. H. Zou, “Anisotropic Si deep beam etching with profile control using SF6 /O2 plasma”, Microsystem Technologies, 10, No 8-9, pp 603-607, (November 2004).
31. R.R.A. Syms, H. Zou, J. Stagg, D.F. Moore, “Multi-state Latching MEMS Variable Optical Attenuator” IEEE Photonics Technology Letters, Vol. 16, No. 1, pp 191-193, (January 2004).
32. H. Zou, D. M. Rowe, S.G.K. Williams, “Peltier effect in a co-evaporated Sb2Te3(P)- Bi2Te3(N) thin film thermocouple”, Thin solid films, Vol. 408, No. 1-2, pp 270-274, (April 2002).
33. H. Zou, D. M. Rowe, G. Min, “Growth of p- and n- type bismuth telluride thin films by co-evaporation”, Journal of Crystal Growth, Vol.222, No. 1-2, pp 82-87, (January 2001).
34. H. Zou, D. M. Rowe, G. Min, “Preparation and characterisation of p-type Sb2Te3 and n-type Bi2Te3 thin films grown by co-evaporation”, Journal of Vacuum Science and Technology A, Vol. 19, No. 3, pp 899-903, (May/Jun, 2001).
在讀學生人數
碩士 12 人，博士3人
畢業學生人數
碩士 22 人，博士3人
