內容簡介
版 次:初版
作者簡介
胡正明(Chenming Calvin Hu),IEEE Fellow、美國工程院院士、中國科學院外籍院士,多年從事半導體器件與積體電路領域的前沿性研究工作,對半導體器件的開發及未來的微型化做出了重大貢獻。2001年至2004年在全球規模最大的專業積體電路製造服務公司——台積電擔任CTO,1997年因在元件可靠性方面的貢獻而獲得IEEE電子元件獎(Jack Morton Award),2002年因發展了第一個國際標準的電晶體電路仿真模型而獲得IEEE固態電路獎,2009年因在器件物理和尺寸方面的傑出貢獻而獲得西澤潤一獎(Jun-ichi Nishizawa Medal),發表論文800餘篇,擁有美國專利100餘項,由他指導發表的博士論文60餘篇。同時,還獲得了美國加州大學伯克利分校教育方面的最高獎項——伯克利傑出教育獎。
目錄
Preface
1 Electrons and Holes in Semiconductors
1.1 Silicon Crystal Structure
1.2 Bond Model of Electrons and Holes
1.3 Energy Band Model
1.4 Semiconductors, Insulators, and Conductors
1.5 Electrons and Holes
1.6 Density of States
1.7 Thermal Equilibrium and the Fermi Function
1.8 Electron and Hole Concentrations
1.9 General Theory ofnandp
1.10 Carrier Concentrations at Extremely High and Low Temperatures
1.11 Chapter Summary
PROBLEMS
REFERENCES
GENERAL REFERENCES
2 Motion and Recombination of Electrons and Holes
2.1 Thermal Motion
2.2 Drift
2.3 Diffusion Current
2.4 Relation Between the Energy Diagram and V,%
2.5 Einstein Relationship Between D and u
2.6 Electron-Hole Recombination
2.7 Thermal Generation
2.8 Quasi-Equilibrium and Quasi-Fermi Levels
2.9 Chapter Summary
PROBLEMS
REFERENCES
GENERAL REFERENCES
3 Device Fabrication Technology
3.1 Introduction to Device Fabrication
3.2 Oxidation of Silicon
3.3 Lithography
3.4 Pattern Transfer-Etching
3.5 Doping
3.6 Dopant Diffusion
3.7 Thin-Film Deposition
3.8 Interconnect-The Back-End Process
3.9 Testing, Assembly, and Qualification
3.10 Chapter Summary-A Device Fabrication Example
PROBLEMS
REFERENCES
GENERAL REFERENCES
4 PN and Metal-Semiconductor Junctions
Part 1 PN Junction
4.1 Building Blocks of the PN Junction Theory
4.2 * Depletion-Layer Model
4.3 Reverse-Biased PN Junction
4.4 Capacitance-Voltage Characteristics
4.5 Junction Breakdown
4.6 Carrier Injection Under Forward Bias--Quasi-Equilibrium Boundary Condition
4.7 Current Continuity Equation
4.8 Excess Carriers in Forward-Biased PN Junction
4.9 PN Diode IV Characteristics
4.10 Charge Storage
4.11 Small-Signal Model of the Diode
Part 2 Application to Optoelectronic Devices
4.12 Solar Cells
4.13 Light-Emitting Diodes and Solid-State Lighting
……
5 MOS Capacitor
6 MOS Transistor
7 MOSFETs in ICs-Scaling, Leakage, and Other Topics
8 Bipolar Transistor