MEMS集成設計技術及套用

基本介紹

• 書名：MEMS集成設計技術及套用
• 作者：苑偉政
• ISBN：978-7-118-09583-8
• 出版時間：2014年12月

內容簡介

書名MEMS集成設計技術及套用

書號978-7-118-09583-8

作者苑偉政

出版時間2014年12月

譯者

版次1版1次

開本16

裝幀精裝

出版基金國防科技圖書出版基金

頁數294

字數349

中圖分類TN4

叢書名微米納米技術叢書·MEMS與微系統系列

定價99.00

本書首先在簡要介紹MEMS（Micro Electro Mechanical Systems）設計技術與設計工具基礎之上，對MEMS設計的關鍵技術——系統級設計技術、器件級設計技術、工藝級設計技術以及各層級轉換接口技術，進行了詳細的分析與論述。

然後對基於這些關鍵技術和泛結構化MEMS集成設計方法的MEMS Garden的特色做了介紹，並通過槓桿放大微加速度計說明了其操作方法。最後，通過大量不同種類的MEMS器件的設計實例驗證了MEMS Garden的通用性與先進性。讀者對象：大專院校MEMS等專業的學生，可將本書用做教材或參考書；MEMS Garden用戶可將本書用做使用手冊。〖BP(〗Brief Introduction〖BP)〗 In this book，firstly，key technologies，including system level design technologies, device level design technologies, process level design technologies and file transform interface among the three levels, of MEMS (Micro Electro Mechanical Systems) are analyzed and discussed after a brief introduction of MEMS design technologies and design tools. Then MEMS Garden, which is based on the key technologies of MEMS design and pan-structured MEMS integrated design method, and its features are presented. And the usage of MEMS Garden is descripted through an example of micro machined leverage accelerometer. At last, the generality and progressiveness of MEMS Garden are verified through design of many different types of MEMS devices. This book can be used as MEMS textbook or reference book. It can be also treated as the users manual of MEMS Garden.

目錄

第1章緒論

1.1引言

1.2MEMS集成設計技術

1.3MEMS集成設計工具現狀與發展趨勢

1.4國外主要MEMS集成設計工具

1.4.1CoventorWare

1.4.2MEMS+

1.4.3MEMS Pro/MEMS Xplorer

1.4.4IntelliSuite

1.5國內MEMS集成設計工具

1.6MEMS集成設計關鍵技術

參考文獻

第2章MEMS系統級仿真平台構建技術

2.1引言

2.2MEMS系統級前處理器技術

2.2.1系統級模型的圖形化建模平台技術

2.2.2系統級異構建模技術

2.2.3系統級模型網表生成技術

2.3MEMS系統級求解器技術

2.3.1外部網表檔案直接求解技術

2.3.2模擬信號求解技術

2.3.3MEMS與接口電路的跨尺度混合信號仿真技術

2.3.4系統級設計最佳化技術

2.4MEMS系統級後處理器技術

2.4.1系統級解算結果波形顯示技術

2.4.2系統級仿真結果的三維可視化技術

參考文獻

第3章MEMS系統級多連線埠組件建模技術

3.1引言

3.2多連線埠組件模型的建立

3.2.1多連線埠組件的一般形式

3.2.2多連線埠組件網路

3.2.3基於硬體描述語言的編碼技術

3.2.4MEMS的多連線埠三維組件庫

3.2.5結構域組件行為建模方法

3.2.6多域耦合組件行為建模方法

3.2.7微流控晶片組件行為建模方法

3.3多連線埠組件模型的自主定義與擴展方法

3.3.1組件構成及其行為方程

3.3.2組件自主定義軟體

參考文獻

第4章MEMS器件級仿真平台構建技術

4.1引言

4.2MEMS器件級仿真模型庫構建技術

4.2.1基於算例庫的MEMS器件級仿真模型庫構建技術

4.2.2有限元形函式館的建立方法

4.3器件物理方程自主定義與求解技術

4.4MEMS器件級求解器技術

4.4.1單能量域分析求解技術

4.4.2多域耦合分析求解技術

4.5器件級設計最佳化技術4.6器件級仿真結果可視化技術

4.6.1數據處理方法

4.6.2數據顯示方法

4.6.3數據保存方法

參考文獻

第5章宏建模技術

5.1引言

5.2大規模線性系統的動態宏建模方法

5.2.1基於Krylov子空間投影的宏建模原理

5.2.2基於疊代IRS技術的動態宏建模方法

5.3非線性系統的動態宏建模方法

5.3.1大變形非線性

5.3.2POD-Galerkin方法

5.4多域耦合系統的動態宏建模方法

5.4.1Hamilton原理與Lagrange動力學方程

5.4.2線性MEMS的模態疊加原理

5.4.3多域耦合MEMS宏模型提取

5.5參數化宏建模技術

5.5.1角度參數化

5.5.2材料屬性參數化

參考文獻

第6章MEMS工藝級建模與仿真技術

6.1引言

6.2MEMS工藝級仿真模型庫構建技術

6.2.1典型MEMS組件的參數化版圖庫構建技術

6.2.2設計規則檢查技術

6.2.3工藝規則檢查技術

6.2.4材料資料庫構建技術

6.3MEMS工藝級幾何仿真技術

6.3.1工藝編輯器技術

6.3.2工藝過程動態可視化技術

6.3.3任意區域版圖的實時三維可視化技術

參考文獻

第7章MEMS集成設計工具轉換接口構建技術

7.1引言

7.2系統級到工藝級轉換技術

7.3系統級到器件級轉換技術

7.4器件級到工藝級轉換技術

7.5器件級到系統級轉換技術

7.6工藝級到器件級轉換技術

7.7工藝級到系統級轉換技術

參考文獻

第8章MEMS Garden及使用

8.1引言

8.2MEMS Garden軟體框架

8.3MEMS Garden特色

8.4軟體操作實例

8.5工程的創建

8.6系統級仿真

8.7器件級仿真

8.8含降階宏模型的系統級仿真

8.8.1矩陣輸出

8.8.2降階宏模型生成

8.8.3系統級仿真

8.9工藝級設計

參考文獻

第9章MEMS Garden器件設計實例

9.1引言

9.2微機械扭轉鏡

9.3諧振式壓力感測器

9.4壓阻式壓力感測器

9.5浮動式剪應力感測器

9.6熱敏剪應力感測器

9.7合成射流器

9.8細胞分選微網篩

9.9Z軸微機械陀螺

9.10微機械加速度計

9.11MEMS光開關

縮略語

Contents

Chapter 1Introduction1

1.1Foreword1

1.2Integrated Design Technologies of MEMS2

1.3Status and trends of MEMS Integrated Design Tools3

1.4Major Foreign MEMS Integrated Design Tools5

1.4.1CoventorWare5

1.4.2MEMS+6

1.4.3MEMS Pro/MEMS Xplorer7

1.4.4IntelliSuite7

1.5Domestic MEMS integrated design tools9

1.6Key Technologies of MEMS integrated design tools10

References10

Chapter 2System Level Simulation Platform Technologies of MEMS12

2.1Foreword12

2.2System Level Pre-processor Technologies of MEMS12

2.2.1Graphical Modeling Technologies of System Level Models13

2.2.2Hybrid Modeling Technologies of System Level14

2.2.3Netlist Creation Technologies of System Level18

2.3Technologies of MEMS System Level Solver18

2.3.1Solving Technologies of External Netlist18

2.3.2Solving Technologies of Analog Signal20

2.3.3Multi-Scale Mixed-Signal Simulation Technologies of MEMS and Interface Circuits25

2.3.4Optimization Technologies of System Level Design28

2.4System Level Post-Processor Technologies of MEMS40

2.4.1Waveform Display Technologies of System Level Simulation Results 40

2.4.23D Visualization Technologies of System Level Simulation Results41

References43

Chapter 3System Level Multi Port Element Network Modeling Technologies of MEMS44

3.1Foreword44

3.2Creation of Multi Port Element Network Models45

3.2.1General Form of Multi Port Elements45

3.2.2Multi Port Element Network50

3.2.3Hardware Description Language Based Coding Techniques51

3.2.4MEMS 3D Multi Port Elements Library52

3.2.5Behavioral Modeling Method of Structure Domain Elements55

3.2.6Behavioral Modeling Method of Multi Energy Domain Coupling Elements64

3.2.7Behavioral Modeling Method of Microfluidic Chip Elements73

3.3Custom Definition and Extend of Multi Port Element Network Models81

3.3.1Constitution of Elements and Their Behavioral Equations82

3.3.2Custom Definition Software83

References84

Chapter 4Device Level Simulation Platform Technology of MEMS87

4.1Foreword 87

4.2MEMS Device Level Simulation Model Library Creation Technologies87

4.2.1MEMS Device Level Simulation Model Library Creation Technologies Based on Example Libraries87

4.2.2Creation Methods of Finite Element Shape Function Libraries101

4.3Custom Definition and Solving Technologies of Device Physical Equations108

4.4Technologies of MEMS Device Level Solver109

4.4.1Solving Technologies of Single Energy Domain109

4.4.2Solving Technologies of Multi Energy Domains124

4.5Optimization Technologies of Device Level Desigh129

4.6Visualization Technologies of Device Level Simulation Results131

4.6.1Data Processing Method131

4.6.2Data Display Method133

4.6.3Data Storing Method136

References137

Chapter 5Macro Modeling Technologies138

5.1Foreword138

5.2Dynamic Macro Modeling Technologies of Large Scale linear Systems138

5.2.1Macro Modeling Principle Based on Krylov Subspace Projection139

5.2.2Dynamic Macro Modeling Method Based on Iterative IRS Technologies151

5.3Dynamic Macro Modeling Methods of Nonlinear Systems154

5.3.1Large Deflection Nonlinearity154

5.3.2POD-Galerkin Method156

5.4Dynamic Macro Modeling Methods of Multi Energy Domain Coupling Systems160

5.4.1Hamilton Principle and Lagrange Kinetic Equation160

5.4.2Modal Superposition Principle of linear MEMS Systems162

5.4.3Macro Model Extraction of Multi Energy Domain Coupling MEMS164

5.5Technologies of Parametric Macro Modeling 167

5.5.1Angular Parameterization167

5.5.2Material Characteristic Parameterization169

References175

Chapter 6Process Level Modeling and Simulation Technologies of MEMS180

6.1Foreword 180

6.2MEMS Process Level Simulation Model Library Creation Technologies181

6.2.1Parametric Layout Library Creation Technologies of Typical MEMS Components181

6.2.2Design Rule Checking Technologies183

6.2.3Process Rule Checking Technologies188

6.2.4Creation Technologies of Material Data Base190

6.3Geometry Simulation Technologies of MEMS Process Level192

6.3.1Technologies of Process Editor192

6.3.2Dynamic Visualization Technologies of Process Procedure196

6.3.3Arbitrary Area Real Time 3D Visualization Technologies of MEMS Layout196

References199

Chapter 7File Transform Interface Creation Technologies of MEMS Integrated Design Tools200

7.1Foreword200

7.2File Transform Technologies of System Level to Process Level201

7.3File Transform Technologies of System Level to Device Level204

7.4File Transform Technologies of Device Level to Process Level206

7.5File Transform Technologies of Device Level to System Level209

7.6File Transform Technologies of Process Level to Device Level212

7.7File Transform Technologies of Process Level to System Level215

References219

Chapter 8Introdultion and Operation of MEMS Garden220

8.1Foreword220

8.2Software Framework of MEMS Garden220

8.3Features of MEMS Garden222

8.4Operation Instance of MEMS Garden224

8.5Creation of Projects225

8.6System Level Simulation225

8.7Device Level Simulation232

8.8System Level Simulation Including Reduced Order Model240

8.8.1Matrix Output240

8.8.2Creation of Reduced Order Model244

8.8.3System Level Simulation244

8.9Process Level Design247

References250

Chapter 9Design Examples of Devices Based on MEMS Garden251

9.1Foreword251

9.2Micro Machined Torsion Mirror251

9.3Resonant Pressure Sensor256

9.4Piezoresistive Pressure Sensor260

9.5Floating Shear Stress Sensor264

9.6Thermal Shear Stress Sensor269

9.7Micro Synthetic Jet271

9.8Micro Sieve for Cell Sorting 274

9.9Z-Axis Micro Machined Gyroscope278

9.10Micro Machined Accelerometer284

9.11MEMS Optical Switch288

Abbreviation"