《特種功能薄膜CVD製備過程熱物理研究和新工藝探索》是依託中國科學技術大學，由王冠中擔任項目負責人的面上項目。
基本介紹
- 中文名：特種功能薄膜CVD製備過程熱物理研究和新工藝探索
- 項目負責人：王冠中
- 項目類別：面上項目
- 依託單位：中國科學技術大學
- 批准號：59976038
- 申請代碼：E0603
- 負責人職稱：教授
- 研究期限：2000-01-01 至 2002-12-31
- 支持經費：14（萬元）
項目摘要
Functional material films are a series of insulating or dielectric films that effectively couple with pressure, temperature, sound, light or other environmental changes. State parameters or environmental changes could be, by functional mterial films, transformed into a new type of energy or conveniently displayed. Chemical Vapor Deposition (CVD) is a normal method in the fabrication of functional material films. Heat and mass transfer, two general thermal physical phenomena, involve in every step of a general CVD process. In our study, material science methods and thermal physical methods were used in investigating in heat and mass transferring process in functional material films, especially for diamond films, fabricated by CVD method. The distribution and changes of temperature and their effect on distribution of reactive radicals in the reactive chamber during the CVD reactive process were investigated by Optical Emission Spectra, Remote Infrared Thermal Meter and Micro Thermal Couples. The heat and mass transferring in the CVD reactive chamber were numerically simulated, and new set-up of the reactor was designed to fabricate high oriented textile diamond films more quickly and stably.
