毛海央

毛海央,中國科學院微電子研究所/江蘇物聯網研究發展中心,副研究員。

基本介紹

  • 中文名:毛海央
  • 國籍:中國
  • 民族:漢
  • 出生地:北京
  • 職業:副研究員
  • 畢業院校:北京大學
基本信息,教育背景,工作簡歷,專利申請,已授權專利,申請中專利,國際專利,研究方向,代表論著,期刊,國際會議論文,科研項目,

基本信息

姓 名: 毛海央
毛海央毛海央
性 別: 女
職 稱: 副研究員
通訊地址: 北京市朝陽區北土城西路3號
所屬部門: 積體電路先導工藝研發中心(十室)

教育背景

2007.09-2011.07,北京大學,信息科學與技術學院微電子學系,研究生/博士學位
2004.09-2007.07,中北大學,電子科學與技術系,研究生/碩士學位
2000.09-2004.07,中北大學,電子工程系,本科/學士學位

工作簡歷

2013.12-至今,中國科學院微電子研究所/江蘇物聯網研究發展中心,副研究員
2011.07-2013.12,中國科學院微電子研究所/江蘇物聯網研究發展中心,助理研究員

專利申請

已授權專利

【1】 毛海央、吳文剛、吳迪、郝一龍、王陽元,一種納米柱森林的加工方法
【2】 毛海央、吳文剛、張煜龍、郝一龍、王陽元,一種多樣性納米結構的加工方法
【3】 毛海央、吳文剛、張煜龍、黃如、郝一龍、王陽元,一種基於表面增強拉曼散射活性基底的微流控檢測器件
【4】 毛海央、陳媛婧、歐文、明安傑,一種高性能MEMS熱電堆紅外探測器結構及其製備方法
【5】 毛海央、陳媛婧、歐文、明安傑,基於黒矽的高性能MEMS熱電堆紅外探測器及其製備方法
【6】 毛海央、歐文、歐毅、陳大鵬,微納尺度材料賽貝克係數的測量機構及其製備方法
【7】 毛海央、吳文剛、歐文、歐毅,一種PM2.5過濾結構及其製備方法
【8】 毛海央、歐文,廚房餘熱收集裝置

申請中專利

【1】 吳文剛、毛海央、呂芃芃,微流控表面增強拉曼散射檢測器件及其製備方法與套用
【2】 毛海央、陳媛婧、歐文,一種納米柱針森林結構的加工方法
【3】 毛海央、歐文、歐毅、陳大鵬,微納尺度材料賽貝克係數測量機構的製備方法
【4】 毛海央、歐文、吳文剛、歐毅,高性能MEMS熱電堆紅外探測器結構及其製備方法
【5】 毛海央、歐文,制熱型MEMS熱電堆紅外探測器結構及其製備方法
【6】 毛海央,一種微凹面鏡的製備方法
【7】 毛海央、諶灼傑、歐文、吳文剛,PM2.5檢測裝置及其製造方法
【8】 毛海央、胡建東、陳媛婧、王玲、歐文,基於紅外氣體感測器的水果成熟度檢測系統
【9】 毛海央、陳媛婧、諶灼傑、歐文、陳大鵬,一種MEMS濕度感測器及製備方法
【10】 吳文剛、諶灼傑、毛海央,一種細顆粒物過濾結構及其製備方法
【11】 毛海央、雷程、陳媛婧、歐文、陳大鵬,食用油檢測裝置和方法
【12】 毛海央、雷程、陳媛婧、歐文、陳大鵬,氣體檢測裝置及系統和氣體檢測方法
【13】 毛海央、王岩、唐力程、雷程、歐文,納米柱/針森林結構的圖形化加工方法

國際專利

【1】 毛海央、歐文,基於黑矽的高性能MEMS熱電堆紅外探測器及其製備方法
【2】 毛海央、歐文,一種高性能MEMS熱電堆紅外探測器結構及其製備方法
【3】 毛海央、歐文,一種MEMS濕度感測器及製備方法

研究方向

MEMS/NEMS感測器(系統)及其加工技術研究

代表論著

期刊

[1] Haiyang Mao, Wengang Wu, Didi She, Gongchen Sun, Pengpeng Lv, and Jun Xu, “Microfluidic Surface-Enhanced Raman Scattering Sensors Based on Nanopillar Forests Realized by Oxygen-Plasma-Stripping-of-Photoresist Technique,” Small
[2] Yuanjing Chen, Haiyang Mao*, Qiulin Tan, Chenyang Xue, Wen Ou,Jin Liu, Dapeng Chen, “Fabrication of polyimide sacrificial layers with inclined sidewalls based on RIE technology
[3] Yuanjing Chen, HaiyangMao*, Qiulin Tan, Chenyang Xue, Wen Ou and Dapeng Chen, Jijun Xiong, “Design of thermopile-based infrared detectors with suspended absorber-thermopile bi-layers,” Chinese Journal of Sensors and Actuators
[4] Mao H*, Yuanjing Chen, Yi Ou, Wen Ou, Jijun Xiong, Chunjuan You, Qiulin Tan, and Dapeng Chen, “Fabrication of Nanopillar Forests with High Infrared Absorptance Based on Rough Poly-Si and Spacer Technology,” J
[5] Haiyang Mao, Yulong Zhang, Wengang Wu, Gongchen Sun, and Jun Xu, “Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography,” Journal of Micromechanics and Microengineering
[6] Haiyang Mao, Wengang Wu, Yulong Zhang, Ge Zhai and Jun Xu, “Fabrication of High-Compact Nanowires Using Alternating Photoresist Ashing and Spacer Technology,” Journal of Micromechanics and Microengineering
[7] Haiyang Mao, Di Wu, Wengang Wu, Jun Xu and Yilong Hao, “Fabrication of Diversiform Nanostructure Forests Based on Residue Nanomasks Synthesized by Oxygen Plasma Removal of Photoresist,”
[8] BAO AiDa , MAO HaiYang*, XIONG JiJun, CHEN ZhuoJie, OU Wen& CHEN DaPeng, “Nanopillar-forest based surface-enhanced Raman scattering substrates,” Science China: Information Sciences
[9] Xiong Jijun, Mao Haiyang, Zhang Wendong, “A novel micro- accelerometer with adjustable sensitivity based on resonant tunneling diodes,” Chinese Physics B
[10] Jijun Xiong, Wendong Zhang, Haiyang Mao, Kaiqun Wang, “Research on double-barrier resonant tunneling effect based stress measurement methods,” Sensors and Actuators: A Physical
[11] Mingrui Sun, Chuang Qian, Wengang Wu, Wenxuan Yu, Yifei Wang, Haiyang Mao, “Self-assembly nanoparticle based tripetaloid structure arrays as surface-enhanced Raman scattering substrates,”
[12] Chuang Qian, Chao Ni, Wenxuan Yu, Wengang Wu, Haiyang Mao, Yifei Wang, Jun Xu, “SERS: Highly-Ordered, 3D Petal-Like Array for Surface-Enhanced Raman Scattering,” Small
[13] Haiyang Mao, Jijun Xiong, Wendong Zhang, Dong Xu, Bo Fan, “Damping in Piezoresistive Micro Accelerometer,” Chinese Journal of Scientific Instrument
[14] Haiyang Mao, Jijun Xiong, Wendong Zhang, Chenyang Xue, Shengbo Sang, Aida Bao, “Piezoresistive Properties of Resonant Tunneling Diodes,” Chinese Journal of Semiconductors
[15] Haiyang Mao, Wendong Zhang, Jijun Xiong, Chenyang Xue, ”Measurement and Research on I-V Coherence of Resonant Tunneling Diode,” Chinese Journal of Scientific Instrument
[16] Haiyang Mao, Jijun Xiong, Wendong Zhang, Tao Guo, Dong Xu, “Design and Analysis of Damping in Multi-ranged Piezoresistive Micro Accelerometer,” Chinese Journal of Sensors and Actuators
[17] Jijun Xiong, Haiyang Mao, Wendong Zhang, Dong Xu, Tao Guo, ”Research on Multi-ranged Micro Accelerometer,” Chinese Journal of Sensors and Actuators

國際會議論文

[1] C. Lei, L.C. Tang, H.Y. Mao*, Y. Wang, J.J. Xiong , W. Ou, W.B. Wang, A.J. Ming, Q.L. Tan, D.P. Chen and D. Li, “Nanofiber Forests as A Humidity-Sensitive Material,” accepted by The 25th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2015)
[2] Y. Wang, L.C. Tang, H.Y. Mao*, C. Lei, W. Ou, J.J. Xiong , W.B. Wang, A.J. Ming, Q.L. Tan, D.P. Chen and D. Li, “Fabrication of Patternable Nanopillars for Microfluidic SERS Devices based on Gap-Induced Uneven Etching,” accepted by The 25th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2015)
[3] H.Y. Mao*, C. Lei, Y. J. Chen, Z. J. Chen, W. Ou, W. G. Wu, A. J. Ming, and D. P. Chen, “Nanofiber Forests with High Infrared Absorptance,” The 24th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2014)
[4] H.Y. Mao, P.P. Lv and W.G. Wu, “Microfluidic Surface-enhanced Raman Scattering Sensors for Online Monitoring Trace Chemical Mixing and Reaction,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 2011)
[5] H.Y. Mao, W.G. Wu*, Y.L. Zhang, P.P. Lv, C. Qian, and J. Xu, “Silicon Nanopillar-Forest Based Microfluidic Surface-Enhanced Raman Scattering Devices,” The 24th IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2011)
[6] Haiyang Mao, Chuang Qian, Pengpeng Lv, and Wengang Wu, “SERS-active substrates based on metallic nanocracks on PDMS,” The 6th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2011)
[7] Qinghua Chen, Wengang Wu, Haiyang Mao, Bochao Du, Li Li, Yilong Hao, “Dualfunctional MEMS Optical Device with Compound Electrostatic Actuators for Compact and Flexible Photonic Networks,” 2010 Ninth IEEE Sensors Conference (SENSORS 2010)
[8] Haiyang Mao, Wengang Wu, Qinghai Liu, Yulong Zhang, Yan Li, “Nanofiber-based Surface Microfluidic Structures for Cell and Nanoparticle Patterning,” The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010)
[9] Haiyang Mao, Yulong Zhang, Wengang Wu*, Chenyang Xue, “Fabrication of nanofiber-based SERS-active substrates by oxygen plasma removal of SU-8 photoresist,” The 5th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2010)
[10] H.Y. Mao, D. Wu, W.G. Wu, J. Xu, H.X. Zhang and Y.L. Hao, “Fabrication of Nanopillars Based on Silicon Oxide Nanopatterns Synthesized in Oxygen Plasma Removal of Photoresist,” The 22nd IEEE International Conference on Micro Electro Mechanical System (IEEE MEMS 2009), Sorrento
[11] Y.L. Zhang, H.Y. Mao, and W.G. Wu, “Fabrication of orderly and uniform nanotip arrays based on oxygen plasma etching of photoresist,” The 11th Annual Conference of the China Society of Micro-Nano Technology
[12] D. Wu, H.Y. Mao, W.G. Wu, “Fabrication of Compact Collateral Silicon Nanowires Based on Continuously Alternating Deposition,” The 4th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2009)
[13] Jijun Xiong, Haiyang Mao, Wendong Zhang, Dong Xu, Tao Guo, “Research on Micro Accelerometer Array,” The 2th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2007)
[14] Jijun Xiong, Haiyang Mao, Wendong Zhang, Chenyang Xue, “Design, fabrication and measurement of a resonant tunneling diode based micro accelerometer,” 1st Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2006)

科研項目

【1】國家自然科學基金青年基金 納米纖維森林結構製備方法及其紅外吸收特性研究項目負責人
【2】河南省科技開放合作項目 基於MEMS熱電堆紅外氣體感測器的水果成熟度便攜檢測系統研究 所內項目負責人
【3】江蘇省自然科學基金面上項目 納米森林結構製備方法及其MEMS紅外感測器套用基礎研究項目負責人
【4】02專項子課題 MEMS 典型產品技術與設計服務平台,作為科研骨幹承擔“熱電堆型紅外探測器件”產品的研發工作
【5】 國家自然科學基金重點基金項目 集成納米結構的光源與多敏感元一體化的紅外氣體感測器 ,作為科研骨幹負責集成納米結構的MEMS熱電堆紅外探測器研究。

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