張鈺如

張鈺如，女，大連理工大學物理與光電工程學院講師。

基本介紹

• 中文名：張鈺如
• 職業：講師
• 性別：女
• 工作單位：大連理工大學

教育背景

2005.09-2009.07 大連理工大學，光信息科學與技術，學士；

2009.09-2013.12 大連理工大學，電漿物理，直讀博士 （推薦免試）；

2013.04-2013.10 比利時安特衛普大學，理學，雙博士學位；

工作經歷

2014.01-至今 大連理工大學，物理與光電工程學院，講師；

2014.06-至今 碩士研究生導師；

2015.03-至今 比利時安特衛普大學，博士後；

研究領域

1. 國家自然科學基金青年科學基金項目“射頻容性耦合電漿放電中電非對稱效應機理的研究”，項目負責人。

2. 中國博士後科學基金重點項目“甚高頻放電中電非對稱效應與電磁效應相互作用的研究”，項目負責人。

3. 中國博士後科學基金面上項目“脈衝調製射頻電非對稱容性放電的理論研究”，項目負責人。

4. 國家自然科學基金重點項目“甚高頻放電下大面積容性耦合電漿的電磁效應”，主要參與人。

5. 國際科技合作專項“電漿工藝腔室仿真及實驗評價”，主要參與人。

6. 國家科技重大專項“電漿工藝腔室的多場耦合仿真”，主要參與人。

研究方向

1、甚高頻容性耦合電漿中電磁效應的模擬研究；

2、相位調製容性耦合電漿源的特性研究；

3、直流/射頻電漿混合放電特性的模擬研究；

4、射頻感應耦合平面線圈電漿源的特性研究；

出版著作和論文

1. Yu-Ru Zhang, Fei Gao, Xue-Chun Li, Annemie Bogaerts and You-Nian Wang. "Fluid simulation of the bias effect in inductive/capacitive discharges", J. Vac. Sci. Technol. A, 33, 061303 (2015).

2. Yu-Ru Zhang, Stefan Tinck, Peter De Schepper, You-Nian Wang, and Annemie Bogaerts. "Modeling and experimental investigation of the plasma uniformity in CF4/O2 capacitively coupled plasmas, operating in single frequency and dual frequency regime", J. Vac. Sci. Technol. A, 33, 021310 (2015).

3. Yu-Ru Zhang, Annemie Bogaerts and You-Nian Wang. "Fluid Simulation of the Phase-shift Effect in Ar/CF4 capacitively coupled plasmas", J. Phys. D: Appl. Phys., 45, 485204 (2012).

4. Yu-Ru Zhang, Xiang Xu, Annemie Bogaerts and You-Nian Wang. "Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: I. Transient behaviour of electrodynamics and power deposition", J. Phys. D: Appl. Phys., 45, 015202 (2012).

5. Yu-Ru Zhang, Xiang Xu, Annemie Bogaerts and You-Nian Wang. "Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: II. Radial uniformity of the plasma characteristics", J. Phys. D: Appl. Phys., 45, 015203 (2012).

6. Yu-Ru Zhang, Xiang Xu, Shu-Xia Zhao, Annemie Bogaerts and You-Nian Wang. "Comparison of electrostatic and electromagnetic simulations for very high frequency plasmas", Phys. Plasmas, 17, 113512 (2010).

7. Yu-Ru Zhang, Xiang Xu, and You-Nian Wang. "Fluid simulation for influence of metastable atoms on the characteristics of capacitively coupled argon plasmas", Phys. Plasmas, 17, 033507 (2010).

8. Shu-Xia Zhao, Yu-Ru Zhang, Fei Gao, You-Nian Wang and Annemie Bogaerts. "Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study", J. Appl. Phys., 117, 243303 (2015).

9. Yong-Xin Liu, Yu-Ru Zhang, Annemie Bogaerts, and You-Nian Wang. "Electromagnetic effects in high-frequency large-area capacitive discharges: A review", J. Vac. Sci. Technol. A, 33, 020801 (2015).

10. Xiao-Yan Sun, Yu-Ru Zhang, Xue-Chun Li and You-Nian Wang. "Modulations of the plasma uniformity by low frequency sources in a large-area dual frequency inductively coupled plasma based on fluid simulations", Phys. Plasmas, 22, 053508 (2015).

11. Hui-Jing Xu, Shu-Xia Zhao, Yu-Ru Zhang, Fei Gao, Xue-Chun Li and You-Nian Wang. "Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas", Phys. Plasmas, 22, 043508 (2015).

12. Ying-Shuang Liang, Yong-Xin Liu, Yu-Ru Zhang, and You-Nian Wang, "Fluid simulation and experimental validation of plasma radial uniformity in 60 MHz capacitively coupled nitrogen discharges", J. Appl. Phys., 117, 083301 (2015).

13. Fei Gao, Yu-Ru Zhang, Shu-Xia Zhao, Xue-Chun Li and You-Nian Wang. "Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias", Chin. Phys. B, 23, 115202 (2014).

14. Fei Gao, Yu-Ru Zhang, Shu-Xia Zhao, and You-Nian Wang. "Experimental and numerical investigations of the phase-shift effect in capacitively coupled discharges", Phys. Plasmas, 21, 083507 (2014).

15. Fei Gao, Wei Liu, Shu-Xia Zhao, Yu-Ru Zhang and You-Nian Wang. "Changes of the electron dynamics in hydrogen inductively coupled plasma", Chin. Phys. B, 22, 115205 (2013).

16. Zhen-Hua Bi, Zhong-Ling Dai, Yu-Ru Zhang, Dong-Ping Liu and You-Nian Wang. "Effects of reactor geometry and frequency coupling on dual-frequency capacitively coupled plasmas", Plasma Sources Sci. Technol., 22, 055007 (2013).

17. Xiang Xu, Shu-Xia Zhao, Yu-Ru Zhang, and You-Nian Wang. "Phase-shift effect in capacitively coupled plasmas with two radio frequency or very high frequency sources", J. Appl. Phys., 108, 043308 (2010).

18. Wei Jiang, Yu-Ru Zhang, and You-Nian Wang. “Low Temperature Plasma Technology: Methods and Applications”, Chapter 3, Boca Raton: CRC Press, Taylor & Francis Group, 2013

工作成果（獎勵、專利等）

“感性耦合電漿放電模擬軟體”，軟體著作權，2013.11，中國，2013SR118998