基本介紹
- 書名：中國積體電路檢測和測試產業技術創新路線圖
- ISBN：9787121360589
- 頁數：172頁
- 定價：￥69.00
- 出版時間：2019-04
- 開本：16開
圖書信息,圖書目錄,
圖書信息
作譯者：積體電路測試儀器與裝備產業技術創新聯盟
中國積體電路檢測和測試產業技術創新路線圖
中國積體電路檢測和測試產業技術創新路線圖出版時間：2019-04
千 字 數：188
版次：01-01
頁 數：172
開本：16開
裝幀：
I S B N ：9787121360589
紙質書定價：￥69.0
圖書目錄
第一章 積體電路工藝品質控制檢測技術與產品.........................................1
一、積體電路產業中的工藝品質控制概況··················································1
（一）積體電路產業鏈與工藝品質控制檢測布局································1
（二）工藝品質控制檢測技術和設備發展趨勢····································2
（三）工藝品質控制檢測設備市場整體情況········································4
二、矽製程（前道）中的關鍵工藝品質控制檢測技術與設備··················4
（一）圖形化表面檢測技術與設備························································7
（二）無圖形表面檢測技術與設備······················································20
（三）光刻套刻對準測量技術與設備··················································23
（四）其他分析及檢測技術與設備······················································25
（五）前道製程中的工藝品質控制檢測的整體發展趨勢··················26
三、晶圓級封裝（中道）中的關鍵工藝品質控制檢測技術與設備········29
（一）三維表面形貌測量技術與設備··················································30
（二）自動光學檢測技術與設備（中道）··········································35
（三）無圖形表面檢測技術與設備······················································37
（四）中道製程中的工藝品質控制檢測的整體發展趨勢··················37
四、基板與傳統封裝測試（後道）中的關鍵工藝品質控制檢測技術
與設備····································································································38
（一）自動光學檢測技術與設備（後道）········································· 38
（二）自動X 射線檢測技術與設備···················································· 41
（三）後道製程中的工藝品質控制檢測的整體發展趨勢················· 42
第二章 自動化測試設備技術與產品......................................................... 43
一、晶片/模組測試市場需求及發展趨勢·················································· 43
（一）電源管理類晶片的測試需求及趨勢········································· 47
（二）CIS 晶片的測試需求及趨勢······················································ 47
（三）邏輯/混合信號晶片的測試需求及趨勢···································· 49
（四）存儲器晶片的測試需求及趨勢················································· 52
（五）LCD Driver晶片的測試需求及趨勢········································· 54
二、ATE 自動測試機械手的現狀及發展方向··········································· 57
三、模擬及電源管理晶片ATE 設備發展現狀及趨勢······························ 59
四、邏輯/混合信號ATE 測試系統的發展現狀及趨勢····························· 60
五、存儲器ATE 測試系統的發展現狀及趨勢·········································· 62
六、LCD Driver 測試系統的發展現狀及趨勢··········································· 63
七、其他定製化專用積體電路測試設備發展的方向及趨勢··················· 65
八、SLT 測試技術的特點及行業發展前景··············································· 67
九、指紋晶片/模組的測試發展趨勢·························································· 69
十、MEMS晶片的測試發展趨勢······························································ 71
十一、與晶片可測性設計結合的ATE 設備一體化方案路線·················· 73
第三章 測試服務...................................................................................... 75
一、測試服務——平台技術······································································· 77
（一）整體技術需求············································································· 77
（二）發展趨勢····················································································· 77
（三）重點方向····················································································· 78
二、測試服務——共性技術······································································· 81
（一）整體技術需求············································································· 81
（二）重點方向····················································································· 82
（三）發展趨勢····················································································· 84
三、測試服務——產品測試解決方案························································84
（一）先進工藝IP 核測試解決方案····················································85
（二）先進封裝測試解決方案······························································87
（三）先進核心產品測試解決方案······················································90
第四章 軍用與民用積體電路測試差異性研究與技術發展....................... 102
一、整體技術需求······················································································102
二、發展趨勢······························································································103
三、重點方向······························································································105
（一）寬溫測試技術············································································105
（二）抗輻照測試技術········································································107
（三）電磁環境效應測試技術····························································110
（四）全參數、全功能測試技術························································113
（五）故障及失效測試技術································································115
（六）老煉試驗技術············································································117
（七）可測性設計與驗證技術····························································119
第五章 電力電子的測試技術與產品....................................................... 125
一、電力電子產品技術現狀······································································125
（一）功率二極體技術發展及產品····················································127
（二）功率MOSFET 技術發展及產品··············································129
（三）IGBT 技術發展及產品·····························································130
二、功率半導體器件測試技術··································································132
（一）功率半導體器件穩態參數測試················································132
（二）動態參數測試············································································134
（三）功率半導體器件UIS 雪崩耐量測試技術································146
（四）功率半導體器件熱阻測試技術················································150
三、功率半導體器件測試發展趨勢及路線圖··········································153
第六章 市場發展格局............................................................................. 155
一、全球封裝測試業··················································································156
（一）行業規模····················································································156
（二）產業布局··················································································· 157
（三）重點企業排名··········································································· 157
二、我國封裝測試業················································································· 158
（一）行業規模··················································································· 158
（二）產業布局··················································································· 159
（三）重點企業排名··········································································· 159
